Cite this article as:

Venig S. B., Mahdi O. S., Malyar I. V., Sinyov I. V., Smirnov A. V., Kisin V. V. Morphology of Gas Sensitive Tin Dioxide Thin Films Operating at Room Temperature. Izvestiya of Saratov University. New series. Series Physics, 2015, vol. 15, iss. 4, pp. 17-21. DOI: https://doi.org/10.18500/1817-3020-2015-15-4-17-21


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UDC: 
УДК 539.23, 539.25, 681.586
Language: 
Russian

Morphology of Gas Sensitive Tin Dioxide Thin Films Operating at Room Temperature

Abstract

Tin dioxide thin films sensing ethanol vapors above the room temperature (38° C) were deposited by RF magnetron sputtering onto silicon substrates. Microstructure measurements using scanning electron microscopy and atomic force microscopy demonstrate that samples consist of grains shaped rods with nanometer diameters which are oriented normally to the substrate surface. There are pores between the grains penetrating the entire thickness of the films.

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