For citation:
Venig S. B., Mahdi O. S., Malyar I. V., Sinyov I. V., Smirnov A. V., Kisin V. V. Morphology of Gas Sensitive Tin Dioxide Thin Films Operating at Room Temperature. Izvestiya of Saratov University. Physics , 2015, vol. 15, iss. 4, pp. 17-21. DOI: 10.18500/1817-3020-2015-15-4-17-21
This is an open access article distributed under the terms of Creative Commons Attribution 4.0 International License (CC-BY 4.0).
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Russian
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UDC:
УДК 539.23, 539.25, 681.586
Morphology of Gas Sensitive Tin Dioxide Thin Films Operating at Room Temperature
Autors:
Venig Sergey Borisovich, Saratov State University
Mahdi Oday Salman, Saratov State University
Malyar Ivan Vladislavovich, Saratov State University
Sinyov Ilya Vladimirovich, Saratov State University
Smirnov Andrey Vladimirovich, Saratov State University
Kisin Vladimir Vladimirovich, Saratov State University
Abstract:
Tin dioxide thin films sensing ethanol vapors above the room temperature (38° C) were deposited by RF magnetron sputtering onto silicon substrates. Microstructure measurements using scanning electron microscopy and atomic force microscopy demonstrate that samples consist of grains shaped rods with nanometer diameters which are oriented normally to the substrate surface. There are pores between the grains penetrating the entire thickness of the films.
Reference:
- Comini E., Baratto C., Concina I., Faglia G., Falasconi M., Ferroni M., Galstyan V., Gobbi E., Ponzoni A., Vomiero A., Zappa D., Sberveglieri V., Sberveglieri G. Metal oxide nanoscience and nanotechnology for chemical sensors // Sensors and Actuators B. 2013. Vol. 179. P. 3–20.
- Pearce T. C., Schiffman S. S., Nagle H. T., Gardner J. W. Handbook of Machine Olfaction : Electronic Nose Technology. Weinheim : Wiley-VCH, 2003.
- Rembeza S. I., Rembera S. I., Rembera E. S., Svistova T. V., Borsiakova O. I. Electrical resistivity and gas response mechanisms of nanocrystalline SnO2 fi lms in a wide temperature range // Physica Status Solidi (a). 2000. Vol. 179, № 1. С. 147–152.
- Wang S., Wang Z., Liu X., Zhang L. DC and AC response of SnO2 sensor to CO // Sensors and Actuators B. 2008. Vol. 131. P. 318–322.
- Betty C. A., Choudhury S., Girija K. G. Reliability studies of highly sensitive and specifi c multi-gas sensor based on nanocrystalline SnO2 fi lm // Sensors and Actuators B. 2014. Vol. 193. P. 484– 491.
- Kissine V. V., Sysoev V. V., Voroshilov S. A. Conductivity of SnO2 thin fi lms in the presence of surface adsorbed species // Sensors and Actuators B : Chemical. 2001. Vol. 79, № 2. P. 163–170.
- Сысоев В. В., Кучеренко Н. И., Кисин В. В. Текстурированные пленки оксида олова для микросистем распознавания газов // Письма в ЖТФ. 2004. Т. 30, № 18. С. 14–20.
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