Izvestiya of Saratov University.

Physics

ISSN 1817-3020 (Print)
ISSN 2542-193X (Online)


For citation:

Serdobintsev A. A., Venig S. B., Kozlowsky A. V., Volkovoynova L. D. Influence of bending on the structural properties of crystallized silicon films on flexible substrates. Izvestiya of Saratov University. Physics , 2024, vol. 24, iss. 3, pp. 290-296. DOI: 10.18500/1817-3020-2024-24-3-290-296, EDN: YMZNEU

This is an open access article distributed under the terms of Creative Commons Attribution 4.0 International License (CC-BY 4.0).
Published online: 
30.08.2024
Full text:
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Language: 
Russian
Article type: 
Article
UDC: 
539.216.2:53.091
EDN: 
YMZNEU

Influence of bending on the structural properties of crystallized silicon films on flexible substrates

Autors: 
Serdobintsev Aleksey Aleksandrovich, Saratov State University
Venig Sergey Borisovich, Saratov State University
Kozlowsky Alexander V., Saratov State University
Volkovoynova Larisa D., Saratov State University
Abstract: 

Background and Objectives: Silicon is the main semiconductor material used in many areas of human life. It is used in the creation of solar cells, various electronic devices, sensors etc. Also of particular interest is such an actively developing area as flexible electronics. It finds its application in the electronic devices. Thus, it becomes important to study ways to create polycrystalline films of semiconductor materials such as silicon on flexible substrates. The biggest problem with silicon crystallization on flexible substrates is that these substrates are low-melting, and traditional methods of silicon crystallization have an intense thermal effect on the crystallized material, which leads to destruction of the substrate. Materials and Methods: To create the samples, consecutive magnetron sputtering deposition of a silicon layer and then a tin layer onto a polyimide substrate was used. Silicon was crystallized using an infrared pulsed laser due to high absorption in tin layer. The structure of silicon during its bending deformation was studied using Raman spectroscopy. Results: As a result of the study, the sizes of silicon crystallites after crystallization, as well as the stresses in the films during bending, have been determined.

Acknowledgments: 
This work was supported by the Russian Science Foundation (project No. 23-22-00047, https://rscf.ru/project/23-22-00047/).
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Received: 
21.05.2024
Accepted: 
15.07.2024
Published: 
30.08.2024