Izvestiya of Saratov University.


ISSN 1817-3020 (Print)
ISSN 2542-193X (Online)

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Yafarov R. K., Shanygin V. I., Nefedov D. V. Carbon Film Nanocomposite for High-Current Field Electron Sources. Izvestiya of Sarat. Univ. Physics. , 2019, vol. 19, iss. 1, pp. 68-75. DOI: 10.18500/1817-3020-2019-19-1-68-75

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Carbon Film Nanocomposite for High-Current Field Electron Sources

Yafarov Ravil' Kiashshafovich, Saratov State University
Shanygin Vitaliy Iakovlevich, Saratov Branch of Kotel’nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences
Nefedov Denis Vladimirovich, Saratov Branch of Kotel’nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences

Background and Objectives: Requirements and problems are formulated when creating cathode materials for high-current emission electronics. It has been shown that to create autocathodes with a current density of up to 100 A/cm2 and above, the development of new nanostructured carbon materials with a surface density of nanodiamond edges of not less than 106–108 cm-2 is necessary. Using a non-equilibrium low-pressure microwave plasma, the regions of regimes for obtaining carbon film coatings containing the diamond and graphite phases in various volume ratios are determined. Materials and Methods: Plasma-chemical deposition of carbon structures was carried out in a vacuum unit using a microwave ion-plasma source at a frequency of 2.45 GHz. Deposition was carried out on quartz and polycore substrates using ethanol vapor as a working substance at a pressure of from 0.05 Pa to 1.0 Pa. The substrates in the experiments were heated to a temperature of 300 ± 10° C. Studies of carbon structures were carried out using atomic-force and electron microscopy, as well as X-ray analysis and Raman scattering. Results: It was established experimentally and then substantiated using a cluster model of the structure of amorphous carbon, the influence of the mode of deposition of diamond-graphite film structures in the plasma of ethanol vapor on their field emission characteristics. The formation of more uniform and larger π-bonded graphite clusters helps to reduce the activation energy of conductivity in the composite structure and to improve the conditions of electron delivery to nanodiamond crystallites, which have a lower effective work function and higher degradation resistance. Conclusion: The developed technology of plasma-chemical deposition of nano-diamond graphite film structures allows the formation of emitters of cold electrons at temperatures from 250 to 350° C. This makes it possible to combine it with other microelectronic production technologies.


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