Izvestiya of Saratov University.
ISSN 1817-3020 (Print)
ISSN 2542-193X (Online)

modified materials

Formation of Modified Materials in Flows of Low-temperature Plasma

In this paper the results of experimental studies are presented. The experiments were aimed to synthesis of materials with modified properties. A special technique of synthesis in low-temperature plasma flows allows controlling film material parameters. The possibility to control optical, morphological and electrophysical properties is shown by the examples of ZnO and Si films.