Izvestiya of Saratov University.
ISSN 1817-3020 (Print)
ISSN 2542-193X (Online)

magnetron sputtering

Application of Thin Film Structures Based on Amorphous Silicon for pH Measurements in Solutions

Formation possibility of pH-sensor based on amorphous silicon thin films is shown. The principle of sensor operation is similar to the ionselective field effect transistor. Change of the investigated solution pH leads to change of depletion width and conductivity of amorphous silicon thin film structure.