For citation:
Koigerov A. S. SAW devices on frequency harmonics. Features of calculation of SAW parameters by the finite element method. Izvestiya of Saratov University. Physics , 2024, vol. 24, iss. 1, pp. 62-75. DOI: 10.18500/1817-3020-2024-24-1-62-75, EDN: MPIJKU
SAW devices on frequency harmonics. Features of calculation of SAW parameters by the finite element method
Background and Objectives: Acoustoelectronic devices (filters, delay lines, resonators, etc.) are used in a wide range of applications in various industries. Surface acoustic waves (SAW) filters are key elements of wireless communication systems, such as base stations, satellite communication and mobile systems. The aim of this work was to investigate the issue of designing SAW devices on frequency harmonics, which potentially allows you to work at higher frequencies. To design devices using a model of coupling of modes (COM), a set of SAW parameters is required. Materials and Methods: A technique for extracting SAW parameters of the main and multiple frequency harmonics under the electrodes using the finite element method in COMSOL are presented. The methodology and the main features of the analysis of SAW by the numerical method are considered. Then, based on the extracted parameters, a quartz SAW filter and a lithium niobate SAW delay line were calculated using transducers operating at the 3rd harmonic. The results of calculating the frequency response were compared with the results of the experiment. Results and Conclusions: The proposed algorithm allows to extract the SAW parameters of each of the harmonics and take them into account in quick calculations on base COM. The results of numerical analysis of the SAW parameters, a COM model and a matrix approach to formalizing calculations provide the developer with an effective and easily adaptable tool for calculating the frequency responses of SAW devices.
- Bagdasaryan A., Sinitzina T., Mashinin O., Ivanov P., Egorov R. SAW frequency selsection devices for modern communication, radiolocation and telecommunication systems. Electronics: Science, Technology, Business, 2013, no. 8, pp. 128–136 (in Russian).
- Turalchuk P. A., Vendik I. B. Synthesis of the bulk-acoustic-wave bandpass filters taking into account the material parameters of the resonators mulilair structure. Acoust. Phys., 2022, vol. 68, pp. 569–574. https://doi.org/10.1134/S106377102205016
- Gulyaev Y. V., Nikitov S. A., Suchkov S. G., Yankin S. S., Suchkov D. S., Plessky V. P. SAW Radio Frequency Identification Tag for the 6 GHz Band. J. Commun. Technol. Electron., 2015, vol. 60, pp. 402–405. https://doi.org/10.1134/S1064226915040087
- Dorokhov S. P. Multivariable transponder based on the passive RFID-tag by surface acoustic waves. Sensors and Systems, 2018, no. 11 (230), pp. 35–41 (in Russian).
- Antcev I. G., Bogoslovsky S. V. Development of monitoring systems on the basis of tags and sensors based on surface acoustic waves. Innovations, 2015, no. 12, pp. 115–122 (in Russian).
- Eliseev N. Transense/Honeywell’s advanced SAW sensors. Electronics: Science, Technology, Business, 2008, no. 1, pp. 40–45 (in Russian).
- Loiko V. A., Dobrovolsky A. A., Kochemasov V. N., Safin A. R. Self-Oscillators Based on Surface Acoustic Waves (A Review). Journal of the Russian Universities. Radioelectronics, 2022, vol. 25, no. 3, pp. 6–21 (in Russian). https://doi.org/10.32603/1993-8985-2022-25-3-6-21
- Veremeev I. V., Dobershtein S. A., Razgonyaev V. K. P-Matrix Modeling of Saw Resonators and Ladder-Type Saw Filters. Radio Communication Technology, 2018, iss. 3 (38), pp. 61–71 (in Russian). https://doi.org/10.33286/2075-8693-2018-38-61-71
- Dmitriev V. F. Modified equations of coupled surface acoustic waves. Journal of Communications Technology and Electronics, 2009, vol. 54, no. 9, pp. 1077–1086. https://doi.org/10.1134/S1064226909090137
- Koigerov A. S. Analytical Approach to Designing a Combined-Mode Resonator Filter on Surface Acoustic Waves Using the Model of Coupling of Modes. Journal of the Russian Universities. Radioelectronics, 2022, vol. 25, no. 2, pp. 16–28 (in Russian). https://doi.org/10.32603/1993-8985-2022-25-2-16-28
- Kuznetsova I. E., Smirnov A. V., Plekhanova Y. V., Reshetilov A. N., Wang G.-J. Effect of the aperture interdigital transducer on the characteristics of its output signal in a piezoelectric plate. Bulletin of the Russian Academy of Scincec: Physics, 2020, vol. 84, no. 6, pp. 644–647. https://doi.org/10.3103/S1062873820060143
- Timoshenko P. E., Shirokov V. B., Kalinchuk V. V. Finite-element modeling of SAW-filters based on thin films of barium strontium titanate. Ecological Bulletin of Research Centers of the Black Sea Economic Cooperation, 2020, vol. 17, no. 4, pp. 48–56 (in Russian).
- Kvashnin G. M., Sorokin B. P., Burkov S. I. Study of propagation of microwave lamb waves in a piezoelectric layered structure. Acoust. Phys., 2021, vol. 67, pp. 590–596. https://doi.org/10.1134/S1063771021060051
- Campbell C. K. Obtaining the fundamental and harmonic radiation conductances of a reflective SAW interdigital transducer. 1998 IEEE Ultrasonics Symposium. Proceedings, 1998, vol. 1, pp. 169–173. https://doi.org/10.1109/ULTSYM.1998.762124
- Asakawa S., Suzuki M., Kakio S., Tezuka A., Mizuno J. Resonance Properties of Leaky SAW Harmonics on Bonded Dissimilar-Material Structures. 2020 IEEE International Ultrasonics Symposium (IUS), 2020, pp. 1–3. https://doi.org/10.1109/IUS46767.2020.9251535
- Sato T., Otsuka S., Okajima H., Motegi R. Experimental investigation on the operation of SAW devices at harmonic frequencies with stepped-finger interdigital transducer. 1996 IEEE Ultrasonics Symposium. Proceedings, 1996, vol. 1, pp. 267–270. https://doi.org/10.1109/ULTSYM.1996.583971
- Huegli R. GHz filters with third harmonic unidirectional transducers. IEEE Symposium on Ultrasonics, 1990, vol. 1, pp. 165–168. https://doi.org/10.1109/ULTSYM. 1990.171345
- Chen Y., Wu T., Chang K. A COM Analysis of SAW Tags Operating at Harmonic Frequencies. 2007 IEEE Ultrasonics Symposium Proceedings, 2007, pp. 2347–2350. https://doi.org/10.1109/ULTSYM.2007.590
- Hikita M., Kato Y., Matsuda J., Watanabe T., Nakano A. Self-temperature-compensation characteristics at 1st- and 3rd-harmonic frequencies for SAW gas sensor used in sensor network. 2009 IEEE International Ultrasonics Symposium, 2009, pp. 2496–2499. https://doi.org/10.1109/ULTSYM.2009.5441984
- Chauhan V., Weigel R., Hagelauer A., Mayer M., Ruile W., Moellenbeck D., Ebner T., Wagner K. C., Bleyl I., Mayer E., Mayer A. A Nonlinear FEM Model to Calculate Third-Order Harmonic and Intermodulation in TC-SAW Devices. 2018 IEEE International Ultrasonics Symposium (IUS), 2018, pp. 1–9. https://doi.org/10.1109/ULTSYM.2018.8580153
- Koigerov A. S., Balysheva O. L. Rapid Numerical Calculation of Rayleigh Surface Acoustic Wave Parameters for a Model of Coupling Modes. Journal of the Russian Universities. Radioelectronics, 2022, vol. 25, no. 5, pp. 67–79 (in Russian). https://doi.org/10.32603/1993-8985-2022-25-5-67-79
- Tikka A., Al-Sarawi S., Abbott D. Acoustic Wave Parameter Extraction with Application to Delay Line Modelling Using Finite Element Analysis. Sensors & Transducers J., 2008, vol. 95, iss. 8, pp. 26–39.
- Morgan D. Surface Acoustic Wave Filters with Applications to Electronic Communications and Signal Processing. Academic Press, 2010. 448 p.
- Aristarkhov G. M., Gulyaev Yu. V., Dmitriev V. F., Zaichenko K. V., Komarov V. V., Vorob’yov A. V., Zvezdinov N. V., Isaev V. M., Kabanov I. N., Kats B. M., Korchagin A. I., Meshchanov V. P. Fil’tratsiya i spektral’nyi analiz radiosignalov. Algoritmy. Struktury. Ustroistva [Gulyaev Yu. V., ed. Filtering and Spectral Analysis of Radio Signals. Algorithms. Structures. Devices]. Moscow, Radiotekhnika, 2020. 504 p. (in Russian).
- Sinitzina T. V. Metody modelirovaniya vysokoizbiratel’nykh ustroystv chastotnoi selektsii na poverkhnostnykh akusticheskikh volnakh. Dis. doct. tekh. nauk [Modeling methods for highly selective frequency selection devices based on surface acoustic waves: Thesis Diss. Dr. Sci. (Tech.)]. Moscow, 2019. 31 p. (in Russian).
- Liu Y., Cai Y., Zhang Y., Tovstopyat A., Liu S., Sun C. Materials, Design, and Characteristics of Bulk Acoustic Wave Resonator: A Review. Micromachines, 2020, vol. 11, pp. 630. https://doi.org/10.3390/mi11070630
- 535 reads